Fabrication and analytical modeling of integrated heater and thermistor for antenna-coupled bolometers

Assuming the use in antenna-coupled bolometers to detect terahertz wave, integrated heater and thermistor were fabricated with titanium (Ti) on a silicon (Si) substrate, and its electrical responsivity was investigated at room temperature. To establish the dependence of microbolometer's responsivity on sizes and material characteristics of the thermistor and heater, an analytical model was made to describe the temperature rise with current in thermally isolated heater and resultant increase in electrical resistance. Although the behavior of the heater resistance could be reproduced by the model successfully, the responsivity coincides only for a bolometer of short heater length, suggesting the effect of slow response speed of the long heaters.