Laser-focused Cr atomic deposition pitch standard as a reference standard

A chromium (Cr) grating pitch standard is fabricated by a technique of laser-focused atomic deposition. Cosine errors of the grating standard are analyzed and controlled under a relative error of 6 × 10−6 after 10-times iterative calibration. The dimension properties of the standard are measured and analyzed by a calibrated metrological atom force microscope (AFM) with large range. The experimental results show the grating standard has a good uniformity and structural periodicity. Hence, the laser-focused Cr atomic deposition grating can work as a reference standard.