Article ID Journal Published Year Pages File Type
7136620 Sensors and Actuators A: Physical 2015 7 Pages PDF
Abstract
This paper presents a novel MEMS actuator driven by Lorentz force. The actuator has a structure of folded beams, which is favorable for a large lateral stroke. A displacement of more than 55 μm was achieved with a magnetic field of 0.14 T and the diving current of 8 mA. The actuator can generate a large displacement under a low driving voltage and can easily be integrated with CMOS circuits. Lorentz force is proportional to the magnetic field and the driving current, which results in an easy control of the lateral displacement on the diving current. The simple structure and fabrication process ensure the actuator to have a high fabrication yield and good stability.
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
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