Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7137630 | Sensors and Actuators A: Physical | 2013 | 7 Pages |
Abstract
A high-sensitivity, surface-micromachined piezoresistive pressure sensor is proposed for size-demanding applications. The sensor design and theoretical analysis is presented. The sensor combines monocrystalline silicon piezoresistors and a polysilicon membrane. The sensor is fabricated using surface-micromachined technology, with an SOI wafer as the starting material. Two variations of the sensor are fabricated, tested, and characterized. The measured sensitivity is approximately 24Â mVÂ (VÂ atm)â1, which is similar to that of traditional pressure sensors. The influence of design and technology factors on the sensor performance is discussed.
Keywords
Related Topics
Physical Sciences and Engineering
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Electrochemistry
Authors
I.V. Godovitsyn, V.V. Amelichev, V.V. Pankov,