| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7138215 | Sensors and Actuators A: Physical | 2012 | 9 Pages |
Abstract
⺠We propose a band-pass sliding mode controller as a feedback-based driving mechanism for MEMS-based resonators. ⺠The sliding mode dynamics makes use of an adaptive behavioral reference model. ⺠Sliding mode control allows the resonator to be invariant and robust to external disturbances. ⺠The system is driven at resonance even in presence of variations in the stiffness coefficient. ⺠The switching between the constant electrostatic forces depends on the dynamics on the sliding surface.
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Authors
Elie H. Sarraf, Mrigank Sharma, Edmond Cretu,