| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7138237 | Sensors and Actuators A: Physical | 2012 | 7 Pages |
Abstract
⺠Wide investigation and discussion of the properties of a high flexible and easy conformable piezoresistive composite material. ⺠Realization and characterization of thin layer (up to 150 μm) of PDMS-Ni composite for integration in MEMS technology. ⺠Realization in the form of self standing sensing thin film through two process flows based on soft lithography and hot-embossing techniques. ⺠Study of the crosstalk inside the sensing layer and design of electrodes pattern. ⺠Realization of a complete flexible tactile sensor device.
Keywords
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Authors
G. Canavese, S. Stassi, M. Stralla, C. Bignardi, C.F. Pirri,