| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7138278 | Sensors and Actuators A: Physical | 2012 | 6 Pages |
Abstract
⺠Modelling of holed clamped-clamped (CC) beam resonators. ⺠Manufacturing of holed clamped-clamped beam resonators in only six major steps. ⺠Electrical tests performed. ⺠Electrical measurements and analytical model have been compared.
Related Topics
Physical Sciences and Engineering
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Authors
Y. Civet, F. Casset, J.F. Carpentier, S. Basrour,