Flexible, electrostatic microfluidic actuators based on thin film fabrication

► We presented design and fabrication of microvalve for on-chip fluid handling. ► Microvalve was made on flexible substrate technology and with biocompatible materials. ► Microvalve works appropriately with non-polar fluids such as octane and decane. ► One microvalve can withstand pressures up to 23 kPa. ► Micropump operation mode is also possible, 2.3 × 10−2 μl/s, 400 cycle/s.