NF3 decomposition over Al2O3 reagents without water

Several Al2O3 samples were prepared by a precipitation method coupled with ultrasonic treatment, and NF3 decomposition without water over Al2O3 reagents is carried out. The effect of preparation parameters of Al2O3 reagents, such as precipitating agents, structure directing agents, and calcining temperatures on their reactivity for NF3 decomposition has been investigated. The results show that NF3 can be decomposed completely at 400 °C, and full conversion of NF3 maintains 580 min over the best Al2O3 reagent, calcined at 600 °C which was prepared using both PEG-2000 and Tween-60 as structure directing agents, ammonia as a precipitating agent.