Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7150430 | Solid-State Electronics | 2018 | 16 Pages |
Abstract
Owing to the great influence of surface passivation on DC and RF performance of InP-based HEMTs, the DC and RF performance of InAlAs/InGaAs InP HEMTs were studied before and after passivation, using an ultra-thin 15â¯nm atomic layer deposition Al2O3 layer. Increase in Cgs and Cgd was significantly limited by scaling the thickness of the Al2O3 layer. For verification, an analytical small-signal equivalent circuit model was developed. A significant increase in maximum transconductance (gm) up to 1150â¯mS/mm, drain current (IDS) up to 820â¯mA/mm and fmax up to 369.7â¯GHz was observed, after passivation. Good agreement was obtained between the measured and the simulated results. This shows that the RF performance of InP-based HEMTs can be improved by using an ultra-thin ALD-Al2O3 surface passivation.
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Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Muhammad Asif, Chen Chen, Ding Peng, Wang Xi, Jin Zhi,