Spatial Effect of Noises in Electrodeposition Process Control

The propagation of local source noises in space-time and their effect on the concentration field of species in the diffusion layer are analysed in this paper. The source noises are incited by several categories of uncertainties from a realistic control system; they are devised by process physics and a control system structure. In process control, these noises provoke a widespread control error. This paper demonstrates that the control error is limited and attenuates spatially, even if a relatively simple boundary control is applied. The covariance structure of the control errors is found and analysed numerically.