Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7150713 | Solid-State Electronics | 2017 | 7 Pages |
Abstract
This paper reports a fully-integrated, batch-fabricated electromagnetic actuator which features micro-patterned NdFeB magnets. The entire actuator is fabricated through MEMS-compatible laminated surface micromachining technology, eliminating the requirement for further component assembly processes. The fabrication strategy allowed the entire volume of the actuator to be reduced to a small size of 2.5 Ã 2.5 Ã 2 mm3, which is one of the smallest NdFeB-based electromagnetic actuators demonstrated to date. The magnetic properties of NdFeB thin films are further investigated and optimized using different types of lithographically-defined micromolds. By altering the direction of the input current, actuating displacements of approximately ±10 µm are achieved during both the attraction and the repulsion operations. This work demonstrates the viability and compatibility of using polymer-bonded magnets for magnetic MEMS applications.
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Authors
Kai Tao, Jin Wu, Ajay Giri Prakash Kottapalli, Di Chen, Zhuoqing Yang, Guifu Ding, Sun Woh Lye, Jianmin Miao,