Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7151061 | Solid-State Electronics | 2015 | 4 Pages |
Abstract
The impact of scaling on off-state current of p-i-n diodes is studied. A sub-micron p-i-n diode exhibits a dominating surface component of leakage current. Variation in i-layer thickness has an impact on bulk leakage. Bulk leakage scales with cross-sectional area of the diode and surface leakage has been controlled using surface treatments to give ultra low leakage currents of 210 fA for a device of cross sectional area of 0.44 μm2. Devices of 100 nm i-layer thickness show an average bulk and surface current densities of 100 mA/cm2 and 150 fA/μm, respectively.
Keywords
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Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Abhinav Gaur, Matthew Filmer, Paul Thomas, Kunal Bhatnagar, Ravi Droopad, Sean Rommel,