| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7151119 | Solid-State Electronics | 2012 | 6 Pages |
Abstract
⺠State of the art grating couplers for horizontal single and double slot waveguides. ⺠One mask, fully etched structure for high yield applications. ⺠Atomic layer deposited (ALD) high-k dielectrics forming the low refractive index slot in the waveguides. ⺠Optical characterization of the ALD high-k materials by spectroscopic ellipsometry. ⺠An 18.5% measured efficiency for single slot horizontal waveguides.
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Maziar M. Naiini, Christoph Henkel, Gunnar B. Malm, Mikael Ãstling,