| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7151190 | Solid-State Electronics | 2012 | 5 Pages |
Abstract
⺠Multi-Subband Ensemble Monte Carlo study of ultra thin SOI devices for sub-32 nm nodes. ⺠Impact of different Buried OXide configurations on Short Channel Effects (SCEs). ⺠Channel lengths shorter than 20 nm with thick BOX demand thickness smaller than 5 nm. ⺠Thickness variability and mobility reduction become an issue for so small thickness. ⺠Thin BOX combined to ground plane allows the use of thicker channels.
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Electrical and Electronic Engineering
Authors
C. Sampedro, F. Gámiz, L. Donetti, A. Godoy,