Article ID Journal Published Year Pages File Type
7151904 Acta Mechanica Solida Sinica 2017 17 Pages PDF
Abstract
Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator (FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model (often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR.
Related Topics
Physical Sciences and Engineering Engineering Mechanical Engineering
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