Application of Perfect Tracking Control to Large-Scale High-Precision Stage

In the positioning system of the large-scale high-precision stage, the primary resonance mode appears in low frequency, though large-scale high-precision stages are used in industrial fields. In recent years, our research group has applied the perfect tracking control (PTC) method which can design the perfect inverse system of the plant to a large-scale high-precision stage to improve the control performance. Moreover, a synchronous position control based on PTC method is proposed as application to several stages. In early sections, the application of the PTC method to a large-scale stage is introduced. In latter sections, the application to synchronous position control is introduced.