Control of Vibratory MEMS Gyroscopes based on Envelope Models

In this contribution, a systematic method for the design of open- and closed-loop controllers for vibratory MEMS gyroscopes based on so-called envelope models will be presented. The methodology will be carried out for a capacitive gyroscope with electrostatic actuators and sensors. In particular the derivation of an optimized start-up strategy and the design of an unbalance rejection controller will be considered in more detail. The presented theory is validated by numerical simulations as well as by measurement results utilizing a prototype gyroscope.