Residual stress effect on coupling electromechanical factor of epitaxial Barium Strontium Titanate (BST) thin films

Acoustoelastic (AE) effect of a mechanically pre-stressed layered piezoelectric structure of BST is investigated. Two samples of BST (Ba0.8Sr0.2TiO3) thin films were grown by rf-magnetron sputtering deposition techniques on a Pt(100)/MgO(100) and Pt(110)/MgO(110) substrates. The crystallographic orientation of BST thin films is analyzed by X-ray diffraction (XRD). A laser acoustic waves (LA-waves) technique is used to generate surface acoustic waves (SAW) propagating in both samples for epitaxial relationship examination. We perform an extended model to determine the residual stress and strain in BST films using the (XRD) X-ray diffraction measurement and the piezoelectric constitutive equations. Theoretical analysis of (SAW) propagation in a pre-stressed layered piezoelectric structure is achieved to discuss the effect of the measured residual stresses of BST films on the propagation behavior of Rayleigh waves and on the coupled electromechanical factor.