Design and experiment of a millimeter-range and high-frequency compliant mechanism with two output ports

This paper addresses a piezoelectric-actuated compliant mechanism with two output ports to provide tensile and compressive forces along with high dynamic motions for static tension and high-cycle dynamic fatigue testing of small-scale specimens or other precision flexible manipulation applications. A rhombus-type planar multistage displacement amplifier with a pair of guiding flexible beams is designed to realize a millimeter stroke while retaining high fundamental frequency. Improved effect of the guiding flexible beams on the vibration modes and attenuating impact on the output displacement are analyzed respectively by finite element analysis and theoretical kinematics modeling. A prototype is manufactured and the experimental performance evaluation shows a maximum stroke range of 1.44 mm (±720 µm) with the fundamental frequency of 628 Hz.