Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting

Article ID	Journal	Published Year	Pages	File Type
7217384	Materials & Design	2018	23 Pages	PDF

Keywords

silicon Fracture mechanisms Temperature dependence

Related Topics

Physical Sciences and Engineering Engineering Engineering (General)

Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting

Authors

C.M. Lauener, L. Petho, M. Chen, Y. Xiao, J. Michler, J.M. Wheeler,