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Predicting multilayer film's residual stress from its monolayers

Article ID Journal Published Year Pages File Type
7217933 Materials & Design 2016 7 Pages PDF
Keywords
Diamond-like carbonResidual stressMultilayer filmCathodic vacuum arc
Related Topics
Physical Sciences and Engineering Engineering Engineering (General)
Preview
Predicting multilayer film's residual stress from its monolayers
Authors
C.Q. Guo, Z.L. Pei, D. Fan, R.D. Liu, J. Gong, C. Sun,
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Materials & Design
Journal: Materials & Design
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Diamond-like carbon
Residual stress
Multilayer film
Cathodic vacuum arc
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