| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 721820 | IFAC Proceedings Volumes | 2006 | 6 Pages |
Abstract
Two scanning electron microscopy (SEM) based devices for positioning, manipulation and imaging at the nano-scale have been developed. The control and vision system is based on both a commercial scanning probe microscopy (SPM) controller and a client-server approach to ensure that nanopositioning and SEM image processing are executed in real-time. The evaluation of the two devices has been performed by implementing three different applications: (i) attachment of carbon nanotubes on SPM tips, (ii) investigation of mechanical properties of nanowires and (iii) tensile strength measurements for focused electron beam deposits.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Computational Mechanics
Authors
St. Fahlbusch, S. Hoffmann, I. Utke, A. Steinecker, J.-M. Breguet, J. Michler,