Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
721822 | IFAC Proceedings Volumes | 2006 | 7 Pages |
Abstract
We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.
Related Topics
Physical Sciences and Engineering
Engineering
Computational Mechanics
Authors
Peter Bøggild, Dirch Hjorth Petersen, Jakob Kjelstrup-Hansen, Kristian Mølhave, Karin Nordstrøm Andersen, Özlem Sardan,