Article ID Journal Published Year Pages File Type
721822 IFAC Proceedings Volumes 2006 7 Pages PDF
Abstract

We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.

Related Topics
Physical Sciences and Engineering Engineering Computational Mechanics
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