| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 721896 | IFAC Proceedings Volumes | 2006 | 6 Pages |
Abstract
Modern ultra-precision techniques require a positioning uncertainty below the 10 nm range with strokes of more than 200 mm in the x-y-plane. More precise knowledge and modelling of nonlinearities and disturbing influences are necessary to compensate these effects by means of suitable control algorithms. A nonlinear state-space model of an active planar magnetic guidance system is proposed. To describe magnetic hysteresis effects appropriately, the Jiles-Atherton method is applied. The nonlinear model presented in this paper can be used to design a model-based controller for plant linearisation and hysteresis compensation.
Related Topics
Physical Sciences and Engineering
Engineering
Computational Mechanics
Authors
Ralf Volkert, Johannes Zentner, Vladimir Kireev, Oliver Radler, Tom Strohla, Torsten Bertram,