Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7222954 | Optik - International Journal for Light and Electron Optics | 2018 | 5 Pages |
Abstract
Single point diamond turning (SPDT) can directly produce high precision optical parts, but some regularity micro structure in residual surface, and turning processing characteristics limit the surface quality to further improve. Ion beam figuring (IBF), as the last process of optical processing, can remove certain mid and high frequency errors, improve the surface performances without destroying their forms. Therefore, it is proposed to combine SPDT and IBF to manufacturing ultra-high precision surface. Two samples of diamond-turned sphere aluminum mirror were used in this experiment. One samples with surface PV and RMS 226ânm and 12.6ânm decreased to 113ânm and 7.7ânm after ion beam figuring, another sample was improved in the same degree, and the turning marks is removed with surface roughness decreased to 2.8ânm from 3ânm. The experimental results indicate that IBF can remove the turning marks and improve the surface precision in a certain range without destroying the surface form.
Related Topics
Physical Sciences and Engineering
Engineering
Engineering (General)
Authors
Yuetian Huang, Bin Fan, Yongjian Wan, Shijie Li,