Study on the correction method of the deformable mirror surface profile

Before using the deformable mirror (DM) for wavefront beam shaping, it is necessary to correct its surface profile to reduce the high-order aberrations, because the DM surface profile is different from the original set plane. In this paper, we demonstrate a simple method to correct the DM surface profile. The method is verified experimentally by using He-Ne laser. Results show that the DM surface profile is corrected to be near flat-topped by using the method. The output peak-to valley value changes from 2.38 λ to 0.21 λ of the He-Ne laser and the RMS value changes from 0.49 λ to 0.04 λ after correcting the DM surface.