Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7223689 | Optik - International Journal for Light and Electron Optics | 2018 | 6 Pages |
Abstract
In this paper, we present a microelectromechanical systems pressure sensor based on Fabry-Perot interference using anodic bonding, and the design principles and basic mechanical model are introduced. It is found that there is a difference between the experimental and theoretical deflections; thus, it is necessary to consider the actual structure. Furthermore, the sensor is fabricated using lithography, etching, and anodic bonding. Within the pressure measurement range of 0-0.1â¯MPa, the linearity is 99.996%, and the sensitivity is 74.6â¯nmâ¯MPa-1. The test results indicate that the deflection is consistent with the theoretical analysis.
Related Topics
Physical Sciences and Engineering
Engineering
Engineering (General)
Authors
Yixian Ge, Kaijie Cai, Tingting Wang, Jiahong Zhang,