X-ray beam probing of tensile strains in the process of waveguide formation in zinc oxide

Tensile strain and optical confinement in helium-implanted zinc oxide are investigated. High-resolution x-ray diffraction, prism coupling and end-face coupling technique are used to examine the implantation-induced structural changes and waveguide properties. The results show that tensile strain distribution is approximate follow the profile of lattice damage. Both contribute to the decrease of refractive index in zinc oxide. When an appropriate implantation depth is applied, laser beam can be confined between crystal surface and the reduced index layer.