| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 723828 | IFAC Proceedings Volumes | 2006 | 6 Pages |
Abstract
FLYING WAFER was a joint European project funded in the 6th Framework of the European Commission. The objective was to provide a methodology for interlinking European R&D centres in micro- and nanotechnologies to a distributed 300 mm CMOS R&D line. The FLYING WAFER project was carried out as a feasibility study. Therefore, the results provided a model and concept which has the potential of guaranteeing a safe and fast exchange of wafers and data between European R&D nodes to allow multi-site processing.
Related Topics
Physical Sciences and Engineering
Engineering
Computational Mechanics
