Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
724707 | Journal of Electrostatics | 2009 | 5 Pages |
High resolution three-dimensional space charge cartographies obtained on 50 μm PTFE samples by using FLIMM technique are presented in this article. Samples were irradiated by a 30 keV electron beam. Charges were injected according to the grid pattern put on the sample during irradiation. A new measurement strategy associated with a new set-up leads to an improvement in measurements accuracy and precision. With this new strategy, measurements were performed rapidly, at a chosen depth and with a low lateral resolution in order to map the space charge profile in the whole sample and to choose a study area. After selecting an interesting area, space charge cartographies were carried out with a very high lateral resolution of about 1 μm. The irradiated zones according to the grid pattern were well reconstructed and the injection depth did not exceed 4 μm.