Comprehensive ESD protection approach in advanced CMOS SOI technologies

In this paper we describe a 90 nm SOI ESD protection network and design methodology including both device and circuit level characterization data. We compare TLP results of SOI MOSFETs and diodes to bulk devices. We present a new response surface method to optimize device sizes in the ESD networks and show circuit level data comparing TLP test results and SPICE simulation results of an I/O test circuit. We also present product test data for standard ESD stress models.