Article ID Journal Published Year Pages File Type
726539 Materials Science in Semiconductor Processing 2016 5 Pages PDF
Abstract

3-level-3-factor robust parameter design and variance analysis were employed to optimize the formulatimemon process of antimony doped tin oxide (ATO) particles with high conductivity. Results indicated that optimized formulation parameters were as follow: Sb doped content of 11 mol%, calcination temperature of 800 °C and calcination time of 0.75 h. For the ATO powder prepared under the above optimal condition, the conductivity of ATO in the validation experiment was 7.6511 S cm−1, which was almost close to the predicted value, and the ATO powder had smaller diameter, higher transmittance in visible region as well as better thermal insulating properties than its counterparts.

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Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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