Article ID Journal Published Year Pages File Type
726546 Materials Science in Semiconductor Processing 2016 8 Pages PDF
Abstract

Nb doped titania (TiO2:Nb) multilayered films (1–10 layers) with anatase structure were obtained by the low-cost sol–gel and dipping method on microscope glass substrates, followed by thermal treatment at 450 °C for 1 h. After each layer deposition, an intermediate annealing step was performed at 300 °C for 30 min. Doping TiO2 sol–gel films with a low amount of Nb (0.8 at%) allows obtaining an improved CO sensor able to operate under environmental atmosphere (air). It was found that the sensor sensitivity is less dependent on the film thickness but is significantly influenced by Nb doping at the optimal working temperature of 400 °C. Good recovery characteristics were obtained for a wide CO detection range, between 0 and 2000 ppm. The gas-sensing behavior of the films was correlated with the structural, chemical and morphological properties of the multi-layered structures.

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