Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
726798 | Journal of Electrostatics | 2013 | 4 Pages |
Abstract
A novel method is proposed for non-contact measurement of the distribution of electrostatic charge on a surface based on scanning the sample surface with a focused high frequency acoustic beam to excite movement of the sample surface. An electric field is induced by exciting a charged film-like object, and an electric field sensor measures it instead of an electrostatic field. The focused ultrasound waves are generated by controlling individually the phase of each 285 airborne ultrasound transducers.
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Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
K. Kikunaga, T. Hoshi, H. Yamashita, Y. Fujii, K. Nonaka,