Article ID Journal Published Year Pages File Type
727004 Materials Science in Semiconductor Processing 2010 7 Pages PDF
Abstract

Wemple–DiDomenico model parameters for oxides thin layers (Sb2O4, SnO2, ZnO and WO3) have been determined from experimental measurement of reflection R(λ) and T(λ) transmission ratios within the Ultraviolet–Visible–Near-Infrared (UV/VIS/NIR) domain (300–1800 nm). This study allowed deducing ε1(λ) and ε2(λ) expressions. Exploitation of results concerning their variations enabled estimating the plasma pulse ωp, the relaxation time τ, the dielectric constant ε∞ and susceptibility χe. Furthermore, opto-thermal and mechanical investigations have been carried out and discussed relatively to the already established optical and thermal characteristics.

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