Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
727004 | Materials Science in Semiconductor Processing | 2010 | 7 Pages |
Abstract
Wemple–DiDomenico model parameters for oxides thin layers (Sb2O4, SnO2, ZnO and WO3) have been determined from experimental measurement of reflection R(λ) and T(λ) transmission ratios within the Ultraviolet–Visible–Near-Infrared (UV/VIS/NIR) domain (300–1800 nm). This study allowed deducing ε1(λ) and ε2(λ) expressions. Exploitation of results concerning their variations enabled estimating the plasma pulse ωp, the relaxation time τ, the dielectric constant ε∞ and susceptibility χe. Furthermore, opto-thermal and mechanical investigations have been carried out and discussed relatively to the already established optical and thermal characteristics.
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Authors
B. Ouni, A. Boukhachem, S. Dabbous, A. Amlouk, K. Boubaker, M. Amlouk,