| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 727151 | Journal of Electrostatics | 2010 | 9 Pages |
Abstract
The effect of charge injection due to CDM ESD in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, ESD injected charge produces a change for the stiction effect which is inversely proportional to the square of the plate area and a change in the dielectric layer breakdown which is inversely proportional to the plate area. An electric field model is developed to examine charge and voltage modes in MEMS. A charge injection test method is proposed to determine the susceptibility of MEMS to CDM ESD.
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Authors
William D. Greason,