Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation

•Profile surface roughness measurements were performed using a metrological AFM.•AFM tip test is a key technology in roughness measurements.•AFM tip test procedure specified in JIS R 1683: 2007 was adopted.•Uncertainties in roughness measurements were evaluated.•The major sources of uncertainty were AFM tip test and non-uniformity of a sample.

Surface roughness measurements are sometimes performed using an atomic force microscope (AFM) in order to evaluate conditions of thin film fabrication and material surface treatment. Recently precise and reliable surface roughness measurement has been required in order to further improve quality of both thin films and material surfaces. Evaluation method of AFM tip shape is a key technology in the surface roughness measurement using an AFM. An evaluation method of AFM tip shape using a probe examination sample and its evaluation criteria are stipulated in the Japanese Industrial Standard (JIS) R 1683: 2007 “Test method for surface roughness of ceramic thin films by atomic force microscopy”. In this study, profile surface roughness measurements were performed based on JIS R 1683: 2007 and the measurement results are reported.