Article ID Journal Published Year Pages File Type
727326 Journal of Electrostatics 2006 6 Pages PDF
Abstract

This article presents the results obtained by Focused Laser-Intensity Modulation Method (FLIMM) on polytetrafluoroethylene (PTFE) thin films irradiated by electron beam. The positioning of a metallic grid on the sample before irradiation permits to select the irradiated zones. A laser surface scanning allows retrieving the charge boxes and determining their implanted depth. Different studies for various grid pitches and spot sizes fix the lateral resolution which we can attain at around 10 μm. Finally, the space charge evolution with time is presented and gives an indication of their migration inside the structure.

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Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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