Article ID Journal Published Year Pages File Type
728290 Materials Science in Semiconductor Processing 2015 6 Pages PDF
Abstract

Using structural and spectroscopic methods, we have studied epitaxial layers of AlxGa1−xAs solid solutions with n-conductivity obtained by means of MOCVD epitaxy. During carbon doping of AlxGa1−xAs solid solutions at 1.2–6.7*1017 сm−3, the mobility for this concentration of impurities and composition was shown to be abnormally high and twice as high as the calculated value. It was assumed that the ordered position of carbon in a metal sublattice of the solid solution causes changes in the average distance between the ions of the impurities, i.e. an increase in the length of a free path of a charge carrier and thus of its mobility.The identified effect has practical implications for different technological methods of increasing the performance of functional elements of the contemporary optoelectronic base. Physical properties of materials due to the use of the effects of an abnormally high mobility of charge carriers in the epitaxial layer of a heteropair opens up new possibilities in creating new AlxGa1−xAs -based structures.

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Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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