| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 728720 | Materials Science in Semiconductor Processing | 2014 | 5 Pages |
Abstract
The effect of corrosion solution on detection accuracy of gravimetric measurements for determining the porosity and thickness of porous silicon was elaborately investigated. We found that the detection accuracy was remarkably affected by temperature and the composition of corrosion solution. The 1.0 M NaOH with 20% ethanol acted as a novel corrosion solution to remove porous silicon layer, which could improve the detection accuracy of gravimetric measurements for determining the porosity and thickness of porous silicon.
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Authors
Chuan Lai, Xueming Li, Changlu Liu, Xiaogang Guo, Zhen Xiang, Bin Xie, Like Zou,