| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 728798 | Materials Science in Semiconductor Processing | 2013 | 6 Pages |
Calcium copper titanate (CaCu3Ti4O12) or CCTO is one of the most researched giant dielectric constant materials in recent years. In the present work, incoherent light source based photo-assisted metal-organic chemical vapor deposition (MOCVD) has been used to prepare CCTO thin films on Si/SiO2 substrates. Key to this unique processing technique is the use of UV radiation as an additional source of energy in conjunction to the thermal energy. The given Photo-assisted MOCVD processing resulted in polycrystalline CCTO growth on a SiO2 surface. Powder X-ray diffraction and scanning electron microscopy were performed to analyze structural and compositional properties of the CCTO thin film. Ellipsometric measurements indicated a refractive index of 3.03 for the CCTO thin film.
