Article ID Journal Published Year Pages File Type
728842 Materials Science in Semiconductor Processing 2010 5 Pages PDF
Abstract

Pure and doped zinc oxide thin films have been deposited on sapphire substrates by using the sol–gel method and spin coating technique. The X-ray diffraction pattern showed that the deposited films exhibit hexagonal zinc oxide structure. Room temperature photoluminescence measurements show the presence of two emission bands. The predominant near band edge ultraviolet emission is at 3.28 eV and a suppressed broad band of deep level emission in the range of 2.1–2.5 eV. The incorporation of nitrogen is indicative of p-type behavior as observed from X-ray photoelectron spectrum of nitrogen in the doped samples. The p-type conduction of Li, N:ZnO may be attributed to the formation of a LiZn–N complex acceptor.

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Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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