Distorted surface topography observed by atomic force microscopy

Topography of Au thin films deposited by magnetron sputtering technique on a silicon substrate was studied by atomic force microscopy (AFM). Distortion of the surface morphologies as a result of interaction between the film and the probe tip was observed. Some topographical morphologies that look like perfect were distorted. Thus, the reality of the topography by AFM, in some cases, needs to be re-evaluated.