Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
728988 | Materials Science in Semiconductor Processing | 2006 | 6 Pages |
Abstract
Electrically active defects induced by irradiation with MeV electrons in oxygen-rich n-type Ge crystals have been studied by means of capacitance transient techniques. Transformation of the defects upon post-irradiation isochronal and isothermal anneals has also been investigated. It is argued that radiation-induced defects with energy levels at 62 (E62) and 80 meV (E80) below the conduction band edge are associated with complexes of Ge self-interstitials with oxygen-related defects. These complexes are formed upon annealing of electron-irradiated samples at T>50 °C and anneal out at temperatures higher than 140 °C. The activation energy of formation of the dominant E62 defect has been found to be 0.80 eV.
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Authors
V.P. Markevich, A.R. Peaker, A.V. Markevich, V.V. Litvinov, L.I. Murin, V.V. Emtsev,