Article ID Journal Published Year Pages File Type
729052 Materials Science in Semiconductor Processing 2006 5 Pages PDF
Abstract
Deep level transient spectroscopy (DLTS) was used to measure the electrical activity of deep-level defects present in samples with InAs/GaAs quantum dots (QDs). Two of three electron traps revealed in DLTS spectra were identified as related to the EL2 family and the VGa-O center, respectively. The presence of oxygen in the structures was confirmed by secondary ion-mass spectrometry (SIMS) analysis. All traps exhibited extremely non-homogenous spatial distributions. It was concluded that intrinsic point defects at a significantly increased concentration were produced. They accumulated in front of QDs at distances, which are in the range of characteristic sizes of the wave-guides in semiconductor lasers. Consequently, the formation of oxygen-related traps may tend to occur in real device structures, which can be a serious limitation of laser performance if QDs are used as the active region and AlGaAs layers serve optical and electrical confinement.
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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