Article ID Journal Published Year Pages File Type
729125 Materials Science in Semiconductor Processing 2006 6 Pages PDF
Abstract

High-resolution photoinduced transient spectroscopy (HRPITS) has been applied to study electronic properties of point defects in semi-insulating (SI) InP obtained by iron diffusion during the high-temperature annealing in iron-phosphide (IP) ambience. A two-dimensional approach to the spectral analysis of the photocurrent decays recorded in a wide range of temperatures and a neural network method to extracting the parameters of defect centres are used. The defect structure of SI InP wafers annealed under the IP and pure phosphorus atmospheres is compared.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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