Article ID Journal Published Year Pages File Type
729203 Materials Science in Semiconductor Processing 2015 9 Pages PDF
Abstract

In the present work, transparent and conductive Nd doped SnO2 thin films were deposited via spray pyrolysis. Crystallographic, morphological, optical and electrical characterizations of SnO2 were researched as a function of Nd doping. The XRD analysis indicated the films had tetragonal cassiterite tin oxide structure and (211) preferential direction for NdTO-0, NdTO-1, NdTO-2 and NdTO-3 samples changed to (110) plane for NdTO-4 and NdTO-5 samples. The crystalline size and strain analysis were made by using a Williamson–Hall method. The SEM micrographs showed that all films had homogenously scattered pyramidal and small densely nanoparticles. The optical analysis indicated optical band gap value of undoped film increased with 1 at% Nd doping and then it decreased with more Nd content. The Hall measurements indicated that the highest electrical conductivity was obtained for 2 at% Nd doping content.

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