| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 729640 | Materials Science in Semiconductor Processing | 2010 | 4 Pages |
Abstract
The lead magnesium niobate–lead titanate (PMN–PT) thin films with and without the TiO2 seed layer were prepared by a pulsed laser deposition (PLD) deposited on Pt/Ti/SiO2/Si substrates. The films were treated by two-step annealing and normal annealing with rapid thermal annealing (RTA). The effects of two-step annealing and the TiO2 seed layer on the phase composition of PMN–PT films were studied. The results show that the PMN–PT film with TiO2 seed layer can gain a pure perovskite phase with a high (1 0 0) preferential orientation after the two-step annealing technique.
► TiO2 as the seed layer. ► PMN–PT films were treated by the two-step annealing. ► The enhanced property of PMN–PT films result from the formation of film texture.
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
W.L. Li, J.M. Wang, C.Q. Liu, W.D. Fei,