Article ID Journal Published Year Pages File Type
729755 Materials Science in Semiconductor Processing 2010 4 Pages PDF
Abstract

A cost effective, low-temperature approach has been developed for the large-area deposition of ZnO nanorod/nanotube arrays on a ZnO coated glass substrate by the natural oxidation of zinc metal in formamide/water mixtures. The two-step seed deposition and wet-chemical approach exhibited well-controlled growth of highly oriented and densely packed ZnO nanorod/nanotube arrays with large-area homogeneity and uniform morphologies. In order to investigate the quality and alignment of ZnO nanorod arrays grown on the ZnO seed layer coated substrate, three different methods of ZnO coating have been deposited by ultrahigh vacuum evaporation system, DC sputtering and RF sputtering, respectively. Our results showed that the ZnO seed layer grown by RF sputtering resulted in high quality ZnO nanorod arrays.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
Authors
, , , ,